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SEMI E125 — Specification for Equipment Self-Description (EqSD)
This Specification relates to a geometry of 0
SEMI MF42-1105 (Reapproved 0611)
It discusses a component-based architecture using object-oriented and framework technology that helps implementers achieve component interoperability and substitutability
in order to prepare recipes for wafer exposure tools
M05600 - SEMI M56 - 計量装置の測定変動と偏りに起因する費用成分の作業法 Revision:SEMI M56-0307 - Superseded SEMI E125 — Specification forglobal Silicon Wafer Committee20061121global Audits and Reviews Subcommittee20072www. semi. org20073CD ROM200311 11 P TP T Referenced SEMI Standards SEMI E35 Guide to Calculate Cost of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment SEMI E89 Guide for Measurement System Analysis (MSA) SEMI M1 Specifications for Polished Monocrystalline Silicon Wafers S EMI M59 Terminology for Silicon Technology
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