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SEMI E109-0701 (first published)
orgで，そして2009年11月にCD-ROMで入手可能となる。初版は1988年月発行，前版は2001年11月に発行された。
SEMI E1 — Specification for 3 inch
SEMI E5-1296 (technical revision)
SEMI E87-0302 (technical revision)
E01700 - SEMI E17 - Guide for Mass Flow Controller Transient Characteristics Tests Revision:SEMI E17-0600 - Superseded SEMI E109-0701 (first published)1 Purpose 1. 1 The purpose of this Standard is to provide a test method for measurement of mass flow controller (MFC) transient characteristics. 2 Scope 2. 1 This Standard is intended to establish a common basis for communication between users and suppliers of semiconductor equipment. It provides terminology and methodology aimed at eliminating confusion regarding what previously has been referred to as MFC response time. The conditions and procedures