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orgで入手可能となる。初版は1997年6月発行。前版は2003年3月発行。
and recommendations for developing design bases
[Single edition]
where the metal detection limits are 108 to 1010 atoms/cm2
This Standard also provides a Guide for tiers of hydrochloric acid for which a need has been identified
M00400 - SEMI M4 - Specifications for SOS Epitaxial Wafers Revision:SEMI M4-1103 (Withdrawn 0307) - Withdrawn - Historical orgで入手可能となる。初版は1997年6月発行。前版は2003年3月発行。This standard was technically approved by the global Silicon Wafer Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on November 21, 2006. It was available at www. semi. org in February 2007. Originally published in 1978; previously published November 2003. NOTICE: This document was balloted and approved for withdrawal in 2007. These specifications cover requirements for monocrystalline silicon epitaxial
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