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4 The fundamental GEM requirements form the foundation of the GEM Standard
SEMI E87-0701 (technical revision)
6-1103 (Reapproved 1211)
This Standard expands the handler equipment requirements and capabilities in the areas of the processing state model
F05300 - SEMI F53 - Test Method for Evaluating the Electromagnetic Susceptibility of Thermal Mass Flow Controllers Revision:SEMI F53-0120 - Current • Particle CountThe purpose of this Document is to define a structured method for testing and evaluating the electromagnetic susceptibility of mass flow controllers (MFCs). This Document contains the requirements and test method that can be used to evaluate whether an MFC will maintain its functional characteristics when subjected to electromagnetic interference (EMI) levels typical of the industry. The test method covers both the radiated susceptibility (RS) and
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