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12-0116 (technical revision)
This Document provides a test method for determining the roughness of polymer surfaces using contact profilometry (CP)
this standard specifies substrate ID positions for efficient operation based on SEMI D32
SEMI E10 — Specification for Definition and Measurement of Equipment Reliability
their specifications
C01800 - SEMI C18 - Specification for Acetic Acid StdTpc-3DS-IC 12-0116 (technical revision)NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. 1 Purpose 1. 1 The purpose of this Standard is to standardize requirements for acetic acid used in the semiconductor industry and testing procedures to support those specifications. Test methods have been shown to give
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