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E12500 - SEMI E125 - 装置自己記述(EqSD)の仕様 Revision:SEMI E125-0709 - Superseded because this Test Method is

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Description

because this Test Method is independent of the metal's chemistry or electrical activity

SEMI C35-0699 (first published - replaces SEMI C1

Altogether

本スタンダードは,global Liquid Chemicals Committeeで技術的に承認されている。現版は2010年8月27日,global Audits and Reviews Subcommitteeにて発行が承認された。2010年10月にwww

このガイドは,半導体製造設備から放出される可能性のあるガス状及び粒子状汚染物質双方に対する削減方法の選択を行う際に使用されることを意図している。

E12500 - SEMI E125 - 装置自己記述(EqSD)の仕様 Revision:SEMI E125-0709 - Superseded because this Test Method isSubordinate Standards (included) SEMI E125. 1 0710 EqSDSOAP Referenced SEMI Standards (purchase separately) SEMI E30 Generic Model for Communications and Control of Manufacturing Equipment (GEM) SEMI E39 Object Services Standard: Concept, Behavior, and Services SEMI E120 Specification for the Common Equipment Model (CEM) SEMI E120. 1 XML Schema for the Common Equipment Model SEMI E121 Guide for Style & Usage of XML for Semiconductor Manufacturing

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