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SEMI 3D3-0613 (first published)
The purpose of this document is to provide a specification for dichlorosilane (SiH2Cl2) used in the semiconductor industry
SEMI C90 — Test Method and Specification for Testing Perfluoroalkoxy (PFA) Materials Used in Liquid Chemical Distribution Systems
which includes:
originally published in 1990
C00302 - SEMI C3.2 - Specification for Arsine (AsH3) in Cylinders, 99.94% Quality StdPbc-0624 SEMI 3D3-0613 (first published)This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 16, 2017. Available at www. semiviews. org and www. semi. org in February 2018; originally published in 1992; previously published June 2011. The purpose of this Document is to provide specifications for arsine (AsH3) that is used in the semiconductor industry. This Document